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"A high symmetry polysilicon micro hemispherical resonating gyroscope with ..."

Quan Wan et al. (2017)

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DOI: 10.1109/ICSENS.2017.8233984

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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  - conf/ieeesensors/WanG0ZXG17
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  - https://dblp.org/rec/conf/ieeesensors/WanG0ZXG17
Quan Wan, Honghua Gu, Bo Fan, Heming Zhao, Dacheng Xu, Shuwen Guo:
A high symmetry polysilicon micro hemispherical resonating gyroscope with spherical electrodes. IEEE SENSORS 2017: 1-3

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