"Probing anchor losses in AlN-on-Si contour mode MEMS resonators through ..."

Cheng Tu et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808780

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Cheng Tu, Joshua E.-Y. Lee, Astrid Frank, Christoph Schaffel, Uwe Stehr, Matthias Hein:
Probing anchor losses in AlN-on-Si contour mode MEMS resonators through laser Doppler vibrometry. IEEE SENSORS 2016: 1-3

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