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"Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both ..."
Xiaoshan Tong et al. (2019)
- Xiaoshan Tong, Yulong Zhao, Xin Ma, Peng Guo, Qi Zhang, Mingjie Liu, Dongliang Zhang, Aiying Wang:
Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components. IEEE SENSORS 2019: 1-4
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