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"The effect of short beam length and gap distance on the resonance ..."

Ryo Takahashi et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808931

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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  - conf/ieeesensors/TakahashiMKL16
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Ryo Takahashi, Hidetoshi Miyashita, Kentaro Kinoshita, Sang-Seok Lee:
The effect of short beam length and gap distance on the resonance frequencies in Fishbone-shaped microelectromechanical system resonator. IEEE SENSORS 2016: 1-3

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