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"Stress Effects in Semiconducting Metal Oxide (SMOx) Materials on MEMS Gas ..."

Vedant Sumaria, Nishit Goel, Stephen Bart (2021)

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DOI: 10.1109/SENSORS47087.2021.9639570

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  dblp key:
  - conf/ieeesensors/SumariaGB21
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  - https://dblp.org/rec/conf/ieeesensors/SumariaGB21
Vedant Sumaria, Nishit Goel, Stephen Bart:
Stress Effects in Semiconducting Metal Oxide (SMOx) Materials on MEMS Gas Sensors. IEEE SENSORS 2021: 1-4

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