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"An Electrostatic Micropositioner with 3 Degrees-of-Freedom."
Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki (2023)
- Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki:
An Electrostatic Micropositioner with 3 Degrees-of-Freedom. SENSORS 2023: 1-4

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