"Non-Linear Bulk Micromachined Accelerometer for High Sensitivity Applications."

Luke M. Middelburg et al. (2018)

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DOI: 10.1109/ICSENS.2018.8589630

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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Luke M. Middelburg, Brahim El Mansouri, René Poelma, Guo-Qi Zhang, Henk W. van Zeijl, Jia Wei:
Non-Linear Bulk Micromachined Accelerometer for High Sensitivity Applications. IEEE SENSORS 2018: 1-4

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