"Piezoresistive 4H-Silicon Carbide (SiC) pressure sensor."

Piotr Mackowiak et al. (2021)

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DOI: 10.1109/SENSORS47087.2021.9639506

access: closed

type: Conference or Workshop Paper

metadata version: 2024-04-25

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Piotr Mackowiak, Kolja Erbacher, Manuel Baeuscher, Michael Schiffer, Klaus-Dieter Lang, Martin Schneider-Ramelow, Ha-Duong Ngo:
Piezoresistive 4H-Silicon Carbide (SiC) pressure sensor. IEEE SENSORS 2021: 1-4

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