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"A Heat Conduction Structure for the Etching Process of MEMS Devices with ..."
Jianjun Ma et al. (2022)
- Jianjun Ma, Bowen Xing, Pu Chen, Bin Zhou, Qi Wei, Rong Zhang:
A Heat Conduction Structure for the Etching Process of MEMS Devices with Support Anchors. IEEE SENSORS 2022: 1-4
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