"Self-Referencing MEMS Resonator with Dual Mechanical Modes for ..."

David D. Lynes, Hengky Chandrahalim (2024)

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DOI: 10.1109/SENSORS60989.2024.10784658

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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David D. Lynes, Hengky Chandrahalim:
Self-Referencing MEMS Resonator with Dual Mechanical Modes for Temperature-Independent Environmental Sensing. IEEE SENSORS 2024: 1-4

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