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"A force-balanced negative feedback method for MEMS based electrochemical ..."
Guanglei Li et al. (2017)
- Guanglei Li, Junbo Wang, Deyong Chen, Zhenyuan Sun, Lianhong Chen, Jian Chen:
A force-balanced negative feedback method for MEMS based electrochemical seismic sensor. IEEE SENSORS 2017: 1-3
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