"Gas Flow Rate Sensing by Curvature Change of Micro Quartz Resonators."

Xiangzheng Li et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10324888

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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Xiangzheng Li, Ye Chang, Xueyou Sun, Yue Feng, Weiwei Cui, Hao Zhang:
Gas Flow Rate Sensing by Curvature Change of Micro Quartz Resonators. SENSORS 2023: 1-4

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