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"Wavelength stabilization of MEMS Fabry-Pérot filters by capacitive ..."
Sebastian Lehmann, Norbert Neumann, Martin Ebermann (2017)
- Sebastian Lehmann, Norbert Neumann, Martin Ebermann:
Wavelength stabilization of MEMS Fabry-Pérot filters by capacitive sensing - Approach and experimental results. IEEE SENSORS 2017: 1-3
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