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"Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine."

S. Kalaiselvi, L. Sujatha, R. Sundar (2018)

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DOI: 10.1109/ICSENS.2018.8589799

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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  dblp key:
  - conf/ieeesensors/KalaiselviSS18
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  - https://dblp.org/rec/conf/ieeesensors/KalaiselviSS18
S. Kalaiselvi, L. Sujatha, R. Sundar:
Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine. IEEE SENSORS 2018: 1-4

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