"Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers."

Atsushi Isobe et al. (2018)

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DOI: 10.1109/ICSENS.2018.8589945

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-19

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Atsushi Isobe, Yudai Kamada, Takashi Oshima, Yuki Furubayashi, Noriyuki Sakuma, Chisaki Takubo, Yasushi Tainaka, Keiki Watanabe, Tomonori Sekiguchi:
Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers. IEEE SENSORS 2018: 1-4

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