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"Threshold Pressure Sensing Using Parametric Resonance in Electrostatic MEMS."

Md. Nahid Hasan, Mark Pallay, Shahrzad Towfighian (2019)

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DOI: 10.1109/SENSORS43011.2019.8956679

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-16

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  dblp key:
  - conf/ieeesensors/HasanPT19
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  - https://dblp.org/rec/conf/ieeesensors/HasanPT19
Md. Nahid Hasan, Mark Pallay, Shahrzad Towfighian:
Threshold Pressure Sensing Using Parametric Resonance in Electrostatic MEMS. IEEE SENSORS 2019: 1-4

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