"Modeling the anchor effect for estimating performance metrics of a MEMS ..."

Manu Garg et al. (2022)

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DOI: 10.1109/SENSORS52175.2022.9967077

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Manu Garg, Sushil Kumar, Dhairya Singh Arya, Mujeeb Yousuf, Yi Chiu, Pushpapraj Singh:
Modeling the anchor effect for estimating performance metrics of a MEMS Pirani gauge. IEEE SENSORS 2022: 1-4

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