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"Design of Cantilever Diaphragm Array Piezoelectric MEMS Microphone for ..."
Yu-Chen Chen et al. (2019)
- Yu-Chen Chen, Sung-Cheng Lo
, Hsu-Hsiang Cheng, Mingching Wu, I-Yu Huang, Weileun Fang:
Design of Cantilever Diaphragm Array Piezoelectric MEMS Microphone for Signal-To-Noise Ratio Enhancement. IEEE SENSORS 2019: 1-4
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