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"Design Optimization of CMOS- MEMS Staggered Vertical Comb Based Micro ..."
Wenhao Chen et al. (2022)
- Wenhao Chen, Mingzheng Duan, Hadi Tavakkoli, Huahuang Luo, Bin Zhao, Wibool Piyawattanametha, Yi-Kuen Lee:
Design Optimization of CMOS- MEMS Staggered Vertical Comb Based Micro Scanners. IEEE SENSORS 2022: 1-4
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