"Towards Fabrication of Next-Generation Physical Sensors Through ..."

Basit Ali et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10784484

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type: Conference or Workshop Paper

metadata version: 2025-03-03

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Basit Ali, Mehdi Bostan Shirin, Muhammad Muzammil, Ege Nacarkucuk, Sina Zare Pakzad, Umut Kerimzade, B. Erdem Alaca:
Towards Fabrication of Next-Generation Physical Sensors Through Integrating Suspended Sub-Micron Silicon Nanowires with Microelectromechanical Systems. IEEE SENSORS 2024: 1-4

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