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"Performance of an electrostatic actuated micromirror in a vacuum and ..."

Imran Khan et al. (2012)

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DOI: 10.1109/IECON.2012.6389253

access: closed

type: Conference or Workshop Paper

metadata version: 2021-01-12

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Imran Khan, James Chong, Ridha Ben Mrad, Siyuan He, Michael J. Schertzer:
Performance of an electrostatic actuated micromirror in a vacuum and non-vacuum packaging. IECON 2012: 3987-3990

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