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"Robust control of rapid thermal processes applied to vapor deposition ..."
Stanislav Aranovskiy et al. (2014)
- Stanislav Aranovskiy, Aleksandr A. Kapitonov, Alexey A. Bobtsov, Anton A. Pyrkin, Evgeny Zavarin, Denis Davydov, Romeo Ortega:
Robust control of rapid thermal processes applied to vapor deposition processing. ICUMT 2014: 578-583
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