"Investigation of error- and drift sources in a capacitive sensor system ..."

Roumen Nojdelov et al. (2015)

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DOI: 10.1109/ICSENST.2015.7438464

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-15

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Roumen Nojdelov, Dirk Voigt, Arthur S. van de Nes, Stoyan N. Nihtianov:
Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement. ICST 2015: 575-580

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