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"Coordinate measurement on wafer level - From single sensors to sensor arrays."
T. Krah et al. (2013)
- T. Krah, A. Wedmann, K. Kniel, F. Hartig, N. Ferreira, Stephanus Büttgenbach:
Coordinate measurement on wafer level - From single sensors to sensor arrays. ICST 2013: 612-617
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