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"Microcrystalline silicon gauges on flexible substrates for high ..."

Y. Kervran et al. (2013)

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DOI: 10.1109/ICSENST.2013.6727724

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-28

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Y. Kervran, S. Janfaoui, Olivier de Sagazan, Samuel Crand, N. Coulon, J. P. Gauthier, Taieb Mohammed-Brahim:
Microcrystalline silicon gauges on flexible substrates for high deformations with high spatial resolution. ICST 2013: 603-607

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