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"Direct integration of field effect transistors as electro mechanical ..."

Sven Haas et al. (2013)

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DOI: 10.1109/ICSENST.2013.6727679

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-30

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Sven Haas, D. Reuter, Andreas Bertz, Thomas Gessner, M. Schramm, K.-U. Loebel, J. T. Horstmann:
Direct integration of field effect transistors as electro mechanical transducer for stress. ICST 2013: 379-382

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