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"Optimal Scheduling of Combined Wafer Fabrication Equipment Taking ..."

Junqing Sun et al. (2019)

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DOI: 10.1109/ICSAI48974.2019.9010419

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-06

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Junqing Sun, Yilin Wang, Meiling Feng, Bin Sun:
Optimal Scheduling of Combined Wafer Fabrication Equipment Taking Mechanical Arms as Buffers. ICSAI 2019: 23-27

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