"Close-down process scheduling of wafer residence time-constrained ..."

Qinghua Zhu et al. (2017)

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DOI: 10.1109/ICRA.2017.7989068

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-04

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Qinghua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu:
Close-down process scheduling of wafer residence time-constrained multi-cluster tools. ICRA 2017: 543-548

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