"Efficient Real-Time Scheduling of Integrated Equipment in Semiconductor ..."

Hyun Joong Yoon, Doo Yong Lee (2002)

> Home

Details and statistics

DOI: 10.1109/ROBOT.2002.1014272

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/icra/YoonL02
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/icra/YoonL02
Hyun Joong Yoon, Doo Yong Lee:
Efficient Real-Time Scheduling of Integrated Equipment in Semiconductor Fabrication. ICRA 2002: 3624-3629

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.