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"Extension of UML and Its Conversion to Petri Nets for Semiconductor ..."

MuDer Jeng, Weizhao Lu (2002)

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DOI: 10.1109/ROBOT.2002.1013715

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-09

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MuDer Jeng, Weizhao Lu:
Extension of UML and Its Conversion to Petri Nets for Semiconductor Manufacturing Modeling. ICRA 2002: 3175-3180

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