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"Analysis and characterisation of a kinematically decoupled compliant XY stage."

Xavier Herpe et al. (2015)

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DOI: 10.1109/ICONAC.2015.7313988

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-28

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  dblp key:
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Xavier Herpe, Ross Walker, Xianwen Kong, Matthew W. Dunnigan:
Analysis and characterisation of a kinematically decoupled compliant XY stage. ICAC 2015: 1-6

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