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"Modeling and Schedulability Analysis of Single-Arm Cluster Tools with ..."

Naiqi Wu et al. (2008)

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DOI: 10.1109/ICNSC.2008.4525188

access: closed

type: Conference or Workshop Paper

metadata version: 2023-01-30

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Naiqi Wu, Chengbin Chu, Feng Chu, MengChu Zhou:
Modeling and Schedulability Analysis of Single-Arm Cluster Tools with Wafer Residency Time Constraints Using Petri Net. ICNSC 2008: 84-89

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