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"Petri net-based scheduling analysis of dual-arm cluster tools subject to ..."

Yan Qiao et al. (2013)

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DOI: 10.1109/ICNSC.2013.6548746

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Yan Qiao, Naiqi Wu, MengChu Zhou, Qingyun Dai:
Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints. ICNSC 2013: 252-257

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