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"Real-time feedback control of reactive ion etching using neural networks."

T. Kim, D. Stokes, Gary May (1996)

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DOI: 10.1109/ICNN.1996.549215

access: closed

type: Conference or Workshop Paper

metadata version: 2019-08-23

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  - conf/icnn/KimSM96
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T. Kim, D. Stokes, Gary May:
Real-time feedback control of reactive ion etching using neural networks. ICNN 1996: 2039-2043

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