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"Detecting Star Cracks in Topography Images of Specular Back Surfaces of ..."

Corinna Kofler, Robert Muhr, Gunter Spöck (2018)

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DOI: 10.1109/ICMLA.2018.00067

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-24

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Corinna Kofler, Robert Muhr, Gunter Spöck:
Detecting Star Cracks in Topography Images of Specular Back Surfaces of Structured Wafers. ICMLA 2018: 406-412

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