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"3D Modelling of MEMS Components for Coupled Elastic - Electrostatic ..."
Oddvar Søråsen et al. (2004)
- Oddvar Søråsen, Andreas Vogl, Xuyuan Chen, Liv Furuberg, Klaus Magnus Johansen:
3D Modelling of MEMS Components for Coupled Elastic - Electrostatic Characterization. ICMENS 2004: 509-514
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