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"Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer."
Bradley J. Kirchmayer, Walied A. Moussa, M. David Checkel (2003)
- Bradley J. Kirchmayer, Walied A. Moussa, M. David Checkel:
Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer. ICMENS 2003: 405-
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