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"Verifying Finite Element Simulation for a Piezoresistive MEMS Sensor."

D. Benfield, Walied A. Moussa, Edmond Lou (2005)

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DOI: 10.1109/ICMENS.2005.131

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  persistent URL:
  - https://dblp.org/rec/conf/icmens/BenfieldML05
D. Benfield, Walied A. Moussa, Edmond Lou:
Verifying Finite Element Simulation for a Piezoresistive MEMS Sensor. ICMENS 2005: 454

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