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"First Results in Patterning of Ultra High Aspect Ratio Microstructures by ..."

Martin Bednarzik et al. (2003)

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DOI: 10.1109/ICMENS.2003.1221989

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  - https://dblp.org/rec/conf/icmens/BednarzikSBSL03
Martin Bednarzik, Heinz-Ulrich Scheunemann, Alexander Barth, Daniel Schondelmaier, Bernd Loechel:
First Results in Patterning of Ultra High Aspect Ratio Microstructures by a 4T Wave Length Shifter at BESSY. ICMENS 2003: 177-

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