Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Prognostics of tool failing behavior based on autoassociative Gaussian ..."

Li Zhu, Junghui Chen, Chun-I Chen (2020)

> Home

Details and statistics

DOI: 10.1109/ICIT45562.2020.9067286

access: closed

type: Conference or Workshop Paper

metadata version: 2020-05-04

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/icit2/ZhuCC20
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/icit2/ZhuCC20
Li Zhu, Junghui Chen, Chun-I Chen:
Prognostics of tool failing behavior based on autoassociative Gaussian process regression for semiconductor manufacturing. ICIT 2020: 316-321

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.