"Fabrication of cantilever MEMs structure of C-axis grown AlN film for ..."

Sandeep Singh Chauhan, Sanjeev Kumar Manhas, M. M. Joglekar (2018)

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DOI: 10.1109/ICIT.2018.8352312

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Sandeep Singh Chauhan, Sanjeev Kumar Manhas, M. M. Joglekar:
Fabrication of cantilever MEMs structure of C-axis grown AlN film for energy harvester application. ICIT 2018: 984-988

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