"A Novel Flexure Deflection Device with Damping Function: Towards Laser ..."

Guixin Zhang et al. (2019)

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DOI: 10.1007/978-3-030-27526-6_34

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-10

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Guixin Zhang, Hui Tang, Xun Chen, Xiaohui Guo, Jiedong Li, Haoyu Pan, Shuo Li:
A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography. ICIRA (1) 2019: 393-400

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