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"Electrical Properties of Each Channels in Vertical Stacked Gate-All-Around ..."

Jing Yan, Junkang Li, Rui Zhang (2023)

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DOI: 10.1109/ICICDT59917.2023.10332388

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-04

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Jing Yan, Junkang Li, Rui Zhang:
Electrical Properties of Each Channels in Vertical Stacked Gate-All-Around Nanosheet s-Si pMOSFETs. ICICDT 2023: 159-162

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