BibTeX record conf/icicdt/TriyosoJSMHSL12

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@inproceedings{DBLP:conf/icicdt/TriyosoJSMHSL12,
  author    = {D. H. Triyoso and
               V. Jaschke and
               Jeff Shu and
               S. Mutas and
               Klaus Hempel and
               Jamie K. Schaeffer and
               Markus Lenski},
  title     = {Robust {PEALD} SiN spacer for gate first high-k metal gate integration},
  booktitle = {{ICICDT}},
  pages     = {1--4},
  publisher = {{IEEE}},
  year      = {2012}
}
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