BibTeX record conf/icicdt/TriyosoHOSSL13

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@inproceedings{DBLP:conf/icicdt/TriyosoHOSSL13,
  author    = {Dina H. Triyoso and
               Klaus Hempel and
               Susanne Ohsiek and
               Jeff Shu and
               Jamie K. Schaeffer and
               Markus Lenski},
  title     = {Impact of precursors choice on characteristics of {PEALD} SiN for
               spacer applications},
  booktitle = {Proceedings of 2013 International Conference on {IC} Design {\&}
               Technology, {ICICDT} 2013, Pavia, Italy, May 29-31, 2013},
  pages     = {69--72},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/ICICDT.2013.6563305},
  doi       = {10.1109/ICICDT.2013.6563305},
  timestamp = {Wed, 10 Feb 2021 08:54:24 +0100},
  biburl    = {https://dblp.org/rec/conf/icicdt/TriyosoHOSSL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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