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"The Performance of FRAM Integrated With 3D Trench Hf0.5Zr0.5O2 ..."

Jianjun Li, Tao Du, Wei Li (2023)

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DOI: 10.1109/ICICDT59917.2023.10332410

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-04

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Jianjun Li, Tao Du, Wei Li:
The Performance of FRAM Integrated With 3D Trench Hf0.5Zr0.5O2 Ferroelectric Capacitor. ICICDT 2023: 124-126

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