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"Design process interactions in shallow trench isolation chemical ..."
Conrad Guhl et al. (2021)
- Conrad Guhl, Sascha Bott, I. Can Albayrak, Anne Weitzmann, Robert Krause, Joscha Kappel, Birgit Reinhold, Nan Wu, Michael Zier, Andreas Schüring, Hongwei Ma, Rico Hüselitz, Benjamin Uhlig, Marcus Wislicenus:
Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization. ICICDT 2021: 1-4
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