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"A new aspect of plasma-induced physical damage in three-dimensional scaled ..."
Koji Eriguchi, Yoshinori Takao, Kouichi Ono (2014)
- Koji Eriguchi, Yoshinori Takao
, Kouichi Ono:
A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering. ICICDT 2014: 1-5
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