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"Effect of thermal annealing in H2 atmosphere of SiCxOy films obtained by ..."
Juan Carlos Pérez Trinidad et al. (2023)
- Juan Carlos Pérez Trinidad, Marco Antonio Vasquez-Agustin
, Godofredo García Salgado, Román Romano-Trujillo, Fernando Lopez-Marcos, Heber Vilchis, Enrique Rosendo Andrés, José Juan Gervacio Arciniega, Orlando Cortazar Martínez, Antonio Coyopol Solís:
Effect of thermal annealing in H2 atmosphere of SiCxOy films obtained by HFCVD technique. CCE 2023: 1-7
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