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"SIMS analysis of atomic composition of silicon-germanium films deposited ..."

Hiram E. Martinez, Andrey Kosarev, Y. Kudriavtsev (2015)

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DOI: 10.1109/ICEEE.2015.7357813

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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Hiram E. Martinez, Andrey Kosarev, Y. Kudriavtsev:
SIMS analysis of atomic composition of silicon-germanium films deposited by RF plasma discharge. CCE 2015: 1-3

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